Shenzhou Semiconductor Service Hotline
86-0514-87958686
Precise control
- Adopting multi-level pulse and pulse waveform control technology
- Realize precise RF regulation
- RF stability can be improved by precisely adjusting power output
- Quickly respond to plasma changes and provide customers with reliable pulse control
Stable performance
- Perform feature analysis and adaptive regulation
- Real time detection of reflection coefficient and adjustment of output frequency
- Efficient and stable operation of RF power supply system
- Improve the overall performance and operational stability of RF power supply
Wide frequency range
- The product covers a wide range of RF energy
- Can meet the needs of different customers
- Optimizing process control